Patent · US Active

Yaw-rate sensor with a compensating mass

US9651375B2 · kind B2 · utility

5Cited by
11References
14Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 8, 2013
Grant dateMay 16, 2017
Priority date
Expiry dateDec 2, 2035

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01C19/5747
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A yaw-rate sensor, having a substrate which has a main extension plane, for detecting a yaw rate about a first direction extending either parallel to the main extension plane or perpendicular to the main extension plane. The yaw-rate sensor has a drive device, a first Coriolis mass and a second Coriolis mass, the drive device being configured to drive at least one part of the first Coriolis mass and at least one part of the second Coriolis mass in a direction parallel to a drive direction extending perpendicular to the first direction.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.