Patent · US Active

Yaw rate sensor having three sensitive axes and method for manufacturing a yaw rate sensor

US9651377B2 · kind B2 · utility

0Cited by

1References

22Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Thorsten Balslink · Kirchentellinsfurt, DE
Hendrik Specht · Rübgarten, DE
Johannes Classen · Reutlingen, DE

Key dates

Filing date	Jun 24, 2014
Grant date	May 16, 2017
Priority date	—
Expiry date	Nov 30, 2034

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T29/49117
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A yaw rate sensor includes: a first sensor structure having a first oscillating mass and configured to detect a first yaw rate around a first axis of rotation; a second sensor structure having a second oscillating mass and configured to detect second and third yaw rates around second and third axes of rotation, respectively; and a drive structure coupled to the first and second oscillating masses. The first oscillating mass is drivable into a first drive oscillation along a first oscillation direction, and the second oscillating mass is drivable into a second drive oscillation along a second oscillation direction different from the first oscillation direction. The first axis of rotation is perpendicular to the first oscillation direction, and the second and third axes of rotation are perpendicular to the second oscillation direction.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.