Patent · US Active

MEMS optical device comprising a MEMS magnetic sensing mechansim and MEMS light absorbing structure

US9651423B1 · kind B1 · utility

7Cited by
2References
18Claims
0Family size

Inventor

Key dates

Filing dateJul 10, 2016
Grant dateMay 16, 2017
Priority date—
Expiry dateJul 10, 2036

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01J2005/106
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A MEMS optical device and an array composed thereof are disclosed herein, wherein the MEMS optical device comprises a light absorbing element, a deforming element, and a magnetic detector, wherein the magnetic detector comprises a magnetic source and a magnetic sensor.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.