Patent · US Active

Acceleration sensor structure and use thereof

US9651574B2 · kind B2 · utility

3Cited by

6References

7Claims

0Family size

Assignee

MURATA ELECTRONICS OY · FI

Inventors

Ville-Pekka RYTKÖNEN · Klaukkala, FI
Leif Roschier · Vantaa, FI
Anssi Blomqvist · Helsinki, FI

Key dates

Filing date	Oct 22, 2015
Grant date	May 16, 2017
Priority date	—
Expiry date	Oct 22, 2035

Classification

Technology area (CPC G)Physics
CPC primaryG01P2015/0831
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A MEMS-sensor structure comprising first means and second means coupled for double differential detection and positioned symmetrically to provide quantities for the double differential detection in a phase shift. If the sensor deforms, due to a specifically symmetric positioning of the first and second means, the effect of the displacement is at least partly eliminated.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.