Array substrate and manufacturing method thereof, display panel and display device
US9651839B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Aug 20, 2014 |
| Grant date | May 16, 2017 |
| Priority date | — |
| Expiry date | Aug 20, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/02667
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present invention provides an array substrate and a manufacturing method thereof, a display panel and a display device. The manufacturing method of an array substrate in the present invention comprises: forming light-shielding layers on the base substrate through a patterning process by using a light-shielding layer-doping multiplexing mask plate; and performing doping of CMOS transistors by using the light-shielding layer-doping multiplexing mask plate. In the invention, two mask plates used in manufacturing the light-shielding layer and the doping process in the prior art are replaced with one light-shielding layer-doping multiplexing mask plate, therefore the number of the mask plates during manufacturing is reduced and the cost is decreased. Meanwhile, providing of the light-shielding layer below the N type transistors in the driving region of the array substrate may prevent light-induced leakage current from being generated in the conductive region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.