Optical method for characterizing a diffractive surface and apparatus for implementing such a method
US9652865B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 26, 2014 |
| Grant date | May 16, 2017 |
| Priority date | — |
| Expiry date | May 2, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30108
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical method for characterizing a diffractive surface having a crystal grain structure, including the steps of: a) successively illuminating said surface with a plurality of light beams (Fi) having propagation directions inclined by a same angle Θ; relative to the normal to the surface and of which the projections on the surface form azimuth angle φ{umlaut over (ι)} that are different relative to a reference direction; b) acquiring an image of the surface corresponding to each of the light beams; and c) digitally processing images to obtain at least one item of information on at least one property of the surface chosen from: the grain structure, texture and level of ordering thereof. An optical head (TO) and apparatus for implementing such a method.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.