Light-emitting device and the manufacturing method thereof
US9653666B2 · kind B2 · utility
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1References
15Claims
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Key dates
| Filing date | Mar 23, 2016 |
| Grant date | May 16, 2017 |
| Priority date | — |
| Expiry date | Mar 23, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10H20/882
Abstract
A method of manufacturing a light-emitting device comprises the steps of: providing a substrate; forming a mask block contacting the substrate and exposing a portion of the substrate; implanting an ion into the portion of the substrate to form an ion implantation region; and forming a semiconductor stack on the substrate such that multiple cavities are formed between the semiconductor stack and the ion implantation region; wherein the mask block comprises a material made of metal or oxide.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.