Coating method, coating device and coating generating system
US9656292B2 · kind B2 · utility
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1References
19Claims
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Key dates
| Filing date | Sep 29, 2014 |
| Grant date | May 23, 2017 |
| Priority date | — |
| Expiry date | Sep 29, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/1316
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The invention discloses a coating method, a coating device and a coating system. The coating method comprises: collecting a thickness data of a film on inner walls of a coating chamber; and processing the thickness data to obtain the thickness of the film on the inner walls of the coating chamber. With the coating method, the cleaning for the coating device gets smarter, the troublesome of artificially controlling the cleaning in the prior art is eliminated and thus the cleaning efficiency for the coating device is improved.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.