MEMS microphone with dual-back plate and method of manufacturing the same
US9656854B2 · kind B2 · utility
1Cited by
4References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 29, 2012 |
| Grant date | May 23, 2017 |
| Priority date | — |
| Expiry date | Nov 29, 2032 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2201/0257
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Disclosed herein are a microelectromechanical systems (MEMS) microphone with a dual-back plate, and a method of manufacturing the same. The MEMS microphone according to an exemplary embodiment of the present invention includes: a substrate having a first back plate formed at a central portion thereof; a membrane plate disposed on first support parts formed at both sides on the substrate and vibrated depending on external sound pressure; and a second back plate disposed on second support parts formed at both sides of the membrane plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.