Process for the preparation of trisilylamine from monochlorosilane and ammonia

US9656869B2 · kind B2 · utility

Assignee

• EVONIK DEGUSSA GMBH · DE

Inventors

• Carl-Friedrich Hoppe · Zöblitz, DE
• Hartwig Rauleder · Rheinfelden (Baden), DE
• Ingrid Lunt-Rieg · Frankfurt, DE
• Christian Goetz · Seligenstadt, DE

Key dates

• Filing date: May 15, 2012
• Grant date: May 23, 2017
• Expiry date: May 15, 2032

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C01C1/164
• WIPO field: Materials, metallurgy
• WIPO sector: Chemistry

Abstract

The present invention relates to a specific process for producing trisilylamine from monochlorosilane and ammonia in the liquid phase. The invention further relates to a plant in which such a process can be carried out with advantage.