Mask assembly for thin film vapor deposition and manufacturing method thereof
US9657392B2 · kind B2 · utility
9Cited by
2References
19Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 4, 2013 |
| Grant date | May 23, 2017 |
| Priority date | — |
| Expiry date | Dec 14, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49826
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A mask assembly includes a frame for forming an opening, and a mask fixed to the frame while a tensile force is applied thereto and forming a plurality of pattern openings. The frame includes a frame main body for forming an opening, and a plurality of moving members installed to be movable in at least one direction on the frame main body. The mask is fixed to the moving members while a tensile force is applied thereto.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.