Self calibration for mirror positioning in optical MEMS interferometers
US9658053B2 · kind B2 · utility
2Cited by
1References
21Claims
0Family size
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Key dates
| Filing date | Jan 28, 2014 |
| Grant date | May 23, 2017 |
| Priority date | — |
| Expiry date | Nov 18, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/35
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A Micro-Electro-Mechanical System (MEMS) interferometer provides for self-calibration of mirror positioning of a moveable mirror. The moveable mirror is coupled to a MEMS actuator having a variable capacitance. The MEMS interferometer includes a capacitive sensing circuit for determining the capacitance of the MEMS actuator at two or more known positions of the moveable mirror and a calibration module for using the actuator capacitances at the known positions to compensate for any drift in the capacitive sensing circuit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.