Thermal flow meter
US9658094B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 19, 2012 |
| Grant date | May 23, 2017 |
| Priority date | — |
| Expiry date | Jul 6, 2033 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF01N2560/07
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In order to provide a thermal-type flowmeter highly accurate, with high reliability, and simple in construction, while being available at a lower price, a thermal-type flowmeter as proposed includes a sub-path that takes in a fluid under measurement; a sensor element that measures a flow-rate of the fluid under measurement in the sub-path; a temperature detection element that detects a temperature of the fluid under measurement; a drive circuit that controls a heating temperature of the sensor element; and a protection circuit that protects the drive circuit from noise, a cavity being formed on a substrate of the sensor element, an exothermic resistor being provided on a thin-film part on the cavity through the intermediary of an electrically insulating film, and a flow rate being detected on the basis of temperature distribution in the thin-film part.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.