Self calibration for mirror positioning in optical MEMS interferometers
US9658107B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 15, 2016 |
| Grant date | May 23, 2017 |
| Priority date | — |
| Expiry date | Apr 15, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/35
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A Micro-Electro-Mechanical System (MEMS) apparatus provides for self-calibration of mirror positioning of a moveable mirror of an interferometer. At least one mirror in the MEMS apparatus includes a non-planar surface. The moveable mirror is coupled to a MEMS actuator having a variable capacitance. The MEMS apparatus includes a capacitive sensing circuit for determining the capacitance of the MEMS actuator at multiple reference positions of the moveable mirror corresponding to a center burst and one or more secondary bursts of an interferogram produced by the interferometer based on the non-planar surface. A calibration module uses the actuator capacitances at the reference positions to compensate for any drift in the capacitive sensing circuit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.