Monolithic three-axis magnetic field sensor
US9658298B2 · kind B2 · utility
6Cited by
4References
14Claims
0Family size
Assignee
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Key dates
| Filing date | Oct 10, 2013 |
| Grant date | May 23, 2017 |
| Priority date | — |
| Expiry date | Nov 25, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R33/096
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A three-axis magnetic sensor or magnetometer is provided. Two magnetic sensor Wheatstone bridges using barber pole AMR structures are fabricated on opposite sides of a bump structure formed on a substrate to provide surfaces that are at a predetermined angle with respect to the flat surface of the substrate. The bridge assembly is oriented along the Y axis and the bridges are interconnected such that Y and Z channel signals can be produced by processing of the bridge signals. The X channel signals are provided by an X axis sensor provided on the level surface of the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.