Alignment of single-mode polymer waveguide (PWG) array and silicon waveguide (SiWG) array of providing adiabatic coupling
US9658411B2 · kind B2 · utility
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6Claims
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Key dates
| Filing date | May 12, 2016 |
| Grant date | May 23, 2017 |
| Priority date | — |
| Expiry date | May 12, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12147
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A structure includes a combination of a stub fabricated on a polymer and a groove fabricated on a silicon (Si) chip, with which an adiabatic coupling can be realized by aligning a (single-mode) polymer waveguide (PWG) array fabricated on the polymer with a silicon waveguide (SiWG) array fabricated on the silicon chip. The stub fabricated on the polymer is patterned according to a nano-imprint process along with the PWG array in a direction in which the PWG array is fabricated. The groove fabricated on the silicon chip is fabricated along a direction in which the SiWG array is fabricated.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.