Insulation machine platform, substrate-contact type apparatus, and static electricity elimination method
US9661726B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jun 16, 2015 |
| Grant date | May 23, 2017 |
| Priority date | — |
| Expiry date | Oct 13, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K9/0079
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The present disclosure provides an insulation machine platform, a substrate-contact type apparatus, and a static electricity elimination method. The insulation machine platform includes: a machine platform body including at least one vent hole, and at least one static electricity elimination device; the at least one vent hole corresponds to the at least one static electricity elimination device being located at a position corresponding to the at least one vent hole, respectively, wherein the machine platform body has a supporting surface, underneath which the static electricity elimination device is located, for receiving a substrate. The substrate-contact type apparatus includes the insulation machine platform.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.