Integrated thin film piezoelectric printhead
US9662880B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Sep 11, 2015 |
| Grant date | May 30, 2017 |
| Priority date | — |
| Expiry date | Sep 11, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/853
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A method and structure for a piezoelectric ink jet printhead. The method can include forming a piezoelectric composite from a liquid sol-gel solution. A first layer of the liquid sol-gel solution can be deposited onto a substrate using, for example, a spin coat process, wherein the substrate may be a printhead diaphragm. The first layer may be partially cured, then a second layer of the liquid sol-gel solution can be deposited onto the partially cured first layer, which is then partially cured. Any number of layers of liquid sol-gel solution can be deposited to result in a piezoelectric composite having a suitable thickness. Subsequently, all of the partially cured layers are fully cured. Printhead processing can continue to form a completed piezoelectric ink jet printhead.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.