MEMS sensors and methods for detecting rotation rates
US9664515B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Sep 14, 2015 |
| Grant date | May 30, 2017 |
| Priority date | — |
| Expiry date | Sep 14, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/18
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Micro-electro-mechanical-systems (MEMS) sensors and methods for detecting rates of rotation thereof. The MEMS sensor has at least one driving mass that oscillates along the x-axis, and at least one sensing mass coupled to the driving mass so that the sensing and driving masses move relative to each other in the x direction and are coupled for rotation together about the y and/or z axes. At least one anchor spring couples the driving or sensing mass to an anchor secured to a substrate. Rotation of the MEMS sensor is sensed by sensing relative movement between the substrate and sensing mass. During its oscillation, the driving mass generates an imbalance of the driving and sensing masses with respect to the anchor, and Coriolis forces cause the sensing and driving masses to rotate together about the y or z axis when the MEMS sensor rotates about the y or z axis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.