Complex spatial light modulator and method of fabricating the same
US9665066B2 · kind B2 · utility
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15Claims
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Key dates
| Filing date | Sep 30, 2014 |
| Grant date | May 30, 2017 |
| Priority date | — |
| Expiry date | Apr 16, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03H2225/33
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Provided are a spatial light modulator (SLM) and a method of fabricating the same. The complex spatial light modulator includes a thin film transistor (TFT) layer provided on a substrate, an amplitude type SLM and a phase type SLM electrically connected to the TFT layer, and a first polarizer provided on the phase type SLM, wherein the TFT layer includes transistors electrically connected to the amplitude type SLM and the phase type SLM, respectively, and the amplitude type SLM and the phase type SLM are commonly and electrically connected to the TFT layer and driven.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.