Patent · US Active

System for imaging a signal charged particle beam, method for imaging a signal charged particle beam, and charged particle beam device

US9666405B1 · kind B1 · utility

5Cited by

0References

16Claims

0Family size

Assignee

ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH · DE

Inventors

Stefan Lanio · Erding, DE
Jürgen Frosien · Riemerling, DE
Matthias Firnkes · Walpertskirchen, DE
Benjamin John Cook · Munich, DE

Key dates

Filing date	Feb 18, 2016
Grant date	May 30, 2017
Priority date	—
Expiry date	Feb 18, 2036

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/24592
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

The present disclosure provides a system for imaging a signal charged particle beam emanating from a sample by impingement of a primary charged particle beam. The system includes a detector arrangement having a first detection element for detecting a first signal charged particle sub-beam of the signal charged particle beam originating from a first spot on the sample and a second detection element for detecting a second signal charged particle sub-beam of the signal charged particle beam originating from a second spot on the sample, wherein the first detection element and the second detection element are separated from each other, and signal charged particle optics. The signal charged particle optics includes a coil configured to generate a magnetic field having a magnetic field component parallel to a longitudinal axis of the coil, wherein the magnetic field acts on the first signal charged particle sub-beam and the second signal charged particle sub-beam propagating along the longitudinal axis, and wherein an aspect ratio of the coil is at least 1, and a controller configured to adjust the magnetic field of the coil such that the first signal charged particle sub-beam is directed…

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.