Charged particle beam device, system for a charged particle beam device, and method for operating a charged particle beam device

US9666406B1 · kind B1 · utility

Assignee

• ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH · DE

Inventors

• Stefan Lanio · Erding, DE
• Matthias Firnkes · Walpertskirchen, DE
• Benjamin John Cook · Munich, DE

Key dates

• Filing date: Feb 18, 2016
• Grant date: May 30, 2017
• Expiry date: Feb 18, 2036

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J2237/24592
• WIPO field: Electrical machinery, apparatus, energy
• WIPO sector: Electrical engineering

Abstract

The present disclosure provides a charged particle beam device. The charged particle beam device includes an emitter arrangement configured to generate a primary charged particle beam having two or more primary charged particle sub-beams, a sample stage for supporting a sample, an objective lens for focusing the two or more primary charged particle sub-beams onto the sample, and a primary charged particle optics. The primary charged particle optics includes a coil provided between the emitter arrangement and the objective lens. The coil is configured to generate a magnetic field having a magnetic field component parallel to a longitudinal axis of the coil, wherein the magnetic field acts on the two or more primary charged particle sub-beams propagating along the longitudinal axis, and wherein an aspect ratio of the coil is at least 1. A controller is configured to adjust the magnetic field of the coil such that a first primary charged particle sub-beam of the two or more primary charged particle sub-beams is directed towards a first spot on the sample and a second primary charged particle sub-beam of the two or more primary charged particle sub-beams is directed towards a second sp…