Heated air plasma treatment
US9666415B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 11, 2015 |
| Grant date | May 30, 2017 |
| Priority date | — |
| Expiry date | Jun 21, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H2240/10
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The present disclosure includes atmospheric plasma systems and methods for plasma treating a surface. The plasma system may include a plasma probe configured to receive a source air that is at or above atmospheric pressure and discharge a plasma from a probe tip. It may also include an air supply system including an air supply conduit configured to supply the source air to the plasma probe and a heat source configured to increase a temperature of the source air in the air supply system to above an ambient temperature. The heat source may include an inline heater disposed within the air supply conduit. The source air may be heated to a temperature of 25° C. to 1,000° C. The heated air plasma system may provide a higher plasma dosage to a treated surface and may allow for reduced cycle times and larger plasma treatment working windows.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.