Test mass compensation of mass measurement drift in a microcantilever resonator
US9671350B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Sep 4, 2014 |
| Grant date | Jun 6, 2017 |
| Priority date | — |
| Expiry date | Feb 19, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/0427
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present disclosure provides methods and mechanisms for measuring small masses attached to a substrate within a microcantilever. Specifically, the disclosure describes the measurement of small particles accumulated at a substrate that cannot be flowed through a microchannel within a microcantilever. A resonance measurement is acquired at a first time. A pair resonance measurements is then acquired at a second point in time—one with the test mass at a first position off or along the microcantilever, the second with the test mass at a second position along the microcantilever. Comparing the resonance frequencies determined for the two test mass positions allows for disambiguation of changes in the mass of the particles from changes in the resonant behavior of the microcantilever itself.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.