Optical integrated circuit comprising light path turning micro-mirror inside the optical waveguide and method of manufacturing the same
US9671574B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 10, 2016 |
| Grant date | Jun 6, 2017 |
| Priority date | — |
| Expiry date | Feb 10, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/43
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical integrated circuit comprises optical waveguides, grooves formed by etching the upper cladding layer, the core layer and all or parts of the lower cladding layer close to a end section of the optical waveguide to intercept light transmitted through the core layer of the optical waveguide or to couple light into the core layer, a plurality of bonding pads formed around the groove, micro-mirrors and active optical elements. Such a PLC based optical integrated circuit and a method of manufacturing the same provides a low-cost manufacturing of optical integrated circuits and high quality mirrors for vertical optical coupling scheme.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.