Alkoxyaminosilane compounds and applications thereof
US9677178B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 13, 2015 |
| Grant date | Jun 13, 2017 |
| Priority date | — |
| Expiry date | Dec 6, 2035 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/45525
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
Alkoxyaminosilane compound having formula I, and processes and compositions for depositing a silicon-containing film, are described herein:(R1R2)NSiR3OR4OR5 Formula (I)wherein R1 is independently selected from a linear or branched C1 to C10 alkyl group; a C2 to C12 alkenyl group; a C2 to C12 alkynyl group; a C4 to C10 cyclic alkyl group; and a C6 to C10 aryl group; R2 and R3 are each independently selected from hydrogen; a linear or branched C1 to C10 alkyl group; a C3 to C12 alkenyl group, a C3 to C12 alkynyl group, a C4 to C10 cyclic alkyl group, and a C6 to C10 aryl group; and R4 and R5 are each independently selected from a linear or branched C1 to C10 alkyl group; a C2 to C12 alkenyl group; a C2 to C12 alkynyl group; a C4 to C10 cyclic alkyl group; and a C6 to C10 aryl group.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.