Scanning micromirror with improved performance and related electronic device
US9678333B2 · kind B2 · utility
1Cited by
1References
10Claims
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Key dates
| Filing date | May 4, 2015 |
| Grant date | Jun 13, 2017 |
| Priority date | — |
| Expiry date | May 4, 2035 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B3/0045
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A micromechanical mirror includes a mobile mass carrying a mirror element and provided in a body including semiconductor material. A driving structure is coupled to the mobile mass to cause a scanning movement thereof. The driving structure is configured to generate a combination of a two or more sinusoidal resonant modes in the micromechanical mirror at respective resonant frequencies. This combination approximates a scanning pattern of the mobile mass defined by a linear function which may, in particular, be a triangular shaped function.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.