Patent · US Active

Frequency and amplitude stabilization in MEMS and NEMS oscillators

US9680414B1 · kind B1 · utility

8Cited by
5References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 12, 2016
Grant dateJun 13, 2017
Priority date
Expiry dateFeb 12, 2036

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH03K2005/00286
  • WIPO fieldBasic communication processes
  • WIPO sectorElectrical engineering

Abstract

This invention comprises a nonlinear micro- and nano-mechanical resonator that can maintain frequency of operation and amplitude of operation for a period of time after all external power has been removed from the device. Utilizing specific nonlinear dynamics of the micromechanical resonator, mechanical energy at low frequencies can be input and stored in higher frequencies modes, thus using the multiple degrees of freedom of the resonator to extend its energy storage capacity. Furthermore, the energy stored in multiple vibrational modes can be used to maintain the resonator oscillating for a fixed period of time, even without an external power supply. This is the first demonstration of an “autonomous” frequency source that can maintain a constant frequency and vibrating amplitude when no external power is provided, making it ideal for applications requiring an oscillator in low power, or limited and intermittent power supplies.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.