MEMS force sensors fabricated using paper substrates
US9682856B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 25, 2012 |
| Grant date | Jun 20, 2017 |
| Priority date | — |
| Expiry date | Feb 4, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0862
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
MEMS devices fabricated using inexpensive substrate materials such as paper or fabric, are provided. Using paper as a substrate, low cost, simple to prepare, lightweight, disposable piezoresistive sensors, including accelerometers are prepared. Signal-processing circuitry can also be patterned on the substrate material.The sensors can be utilized as two-dimensional sensors, or the paper substrate material can be folded to arrange the sensors in a three dimensional conformation. For example, three sensors can be patterned on a paper substrate and folded into a cube such that the three sensors are orthogonally positioned on the faces of a cube, permitting simultaneous measurement of accelerations along three orthogonal directions (x-y-z). These paper-based sensors can be mass produced by incorporating highly developed technologies for automatic paper cutting, folding, and screen-printing.Also provided are methods of modifying paper for use as a substrate material in MEMS devices.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.