Integrated circuit with CO2 sensor, composition and manufacturing method of such an IC
US9683099B2 · kind B2 · utility
0Cited by
7References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 4, 2014 |
| Grant date | Jun 20, 2017 |
| Priority date | — |
| Expiry date | Nov 29, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2027/222
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed is an integrated circuit (100) comprising a semiconductor substrate (110) carrying a plurality of circuit elements (111); and a carbon dioxide sensor (120) over said semiconductor substrate, said sensor comprising a pair of electrodes (122, 124) laterally separated from each other; and a carbon dioxide (CO2) permeable polymer matrix (128) at least partially covering the pair of electrodes, said matrix encapsulating a liquid (126) comprising an organic alcohol and an organic amidine or guanidine base. A composition for forming such a CO2 sensor on the IC and a method of manufacturing such an IC are also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.