Reference mirror converter of Linnik interferometer
US9684158B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 20, 2014 |
| Grant date | Jun 20, 2017 |
| Priority date | — |
| Expiry date | Jan 16, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/248
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided is a reference mirror converter of a Linnik interferometer in which a first object lens 30 focuses light emitted from a beam splitter 20 on a reference mirror 40, a plurality of reference mirrors 40 reflects light incident from the first object lens 30, a plurality of reference mirrors 40 is disposed on a plurality of reference mirror brackets 45, respectively, the plurality of reference mirror brackets 45 is disposed on a rotary plate 60 at the same angles, and the rotary plate 60 is rotated using a motor 70 to control a rotation of the rotary plate 60 to select the reference mirror 40 having a reflectivity similar to that of a target 200 to be measured from among the plurality of reference mirrors 40. Accordingly, since a separate state between articles is maintained at all times, adhesiveness between articles packaged with an easily adhesive material may be prevented.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.