Digital exposure device
US9684164B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 31, 2014 |
| Grant date | Jun 20, 2017 |
| Priority date | — |
| Expiry date | Sep 13, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70508
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A digital exposure device includes: a stage having a substrate seated thereon where a pattern is to be formed and moving in a scan direction; a data modification unit receiving design data and generating modified data by extending the design data; and a digital exposure unit receiving the design data and projecting a light controlled according to the design data on the substrate, wherein the modified data includes intermedial data corresponding to the size difference between an image of the design data and an image of the modified data and some of unit data forming the intermedial data are data obtained when unit data of the design data are shifted in any expansion direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.