Negative-working photosensitive siloxane composition
US9684240B2 · kind B2 · utility
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16Claims
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Key dates
| Filing date | Apr 5, 2013 |
| Grant date | Jun 20, 2017 |
| Priority date | — |
| Expiry date | Apr 5, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/40
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
To provide a negative-working photosensitive siloxane composition developable inorganically, and also to provide a cured film-manufacturing method employing that. The present invention provides a negative-working photosensitive siloxane composition comprising a polysiloxane, a silicon-containing compound having an ureido bond, a polymerization initiator, and a solvent. This composition is coat on a substrate, exposed to light, and developed, so that a cured film can be obtained without carrying out post-exposure baking.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.