MEMS/NEMS device comprising a network of electrostatically actuated resonators and having an adjustable frequency response, notably for a band-pass filter
US9685929B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 5, 2014 |
| Grant date | Jun 20, 2017 |
| Priority date | — |
| Expiry date | Nov 5, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2009/02291
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A MEMS/NEMS device having an adjustable frequency response comprises an array of electrostatically actuated resonators, an electrostatic actuation circuit, electrical detection means, and means adjusting the frequency response of the resonators. The device comprises resonators having a movable portion, electrically connected in series between a first biasing potential VB and a second biasing potential VB2, each resonator biased to a potential Vi between VB and VB2, depending on position in the series. The electrostatic actuation circuit comprises, for each resonator, an actuation electrode facing the movable portion, all electrodes being connected in parallel to a common control potential VIN, the actuation voltage of each resonator being equal to VIN−Vi. The detection means comprises a detection output common to all resonators, the output being connected to an output potential Vout. The means for adjusting the frequency response varies the common control potential and/or at least one of the biasing potentials.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.