Patent · US Active

Segmented graphene growth on surfaces of a patterned substrate layer and devices thereof

US9688540B2 · kind B2 · utility

5Cited by
0References
20Claims
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Assignee

Inventor

Key dates

Filing dateJan 15, 2014
Grant dateJun 27, 2017
Priority date
Expiry dateJan 15, 2034

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC01B2204/04
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A method of forming a graphite-based structure on a substrate comprises patterning the substrate thereby forming a plurality of elements on the substrate. Each respective element in the plurality of elements is separated from an adjacent element on the substrate by a corresponding trench in a plurality of trenches on the substrate and each respective element in the plurality of elements has a corresponding top surface. The method further comprises segmentedly depositing a graphene initiating layer onto the top surface of each respective element in the plurality of elements; and generating graphene using the graphene initiating layer thereby forming the graphite-based structure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.