Patent · US Active

Layered transparent conductive oxide thin films

US9688570B2 · kind B2 · utility

1Cited by
1References
17Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 4, 2014
Grant dateJun 27, 2017
Priority date
Expiry dateMar 4, 2034

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC03C2218/345
  • WIPO fieldMaterials, metallurgy
  • WIPO sectorChemistry

Abstract

Transparent conductive oxide thin films having a plurality of layers with voids located at each interface. Smooth TCO surfaces with no post growth processing and a largely tunable haze value. Methods of making include applying multiple layers of a conductive oxide onto a surface of a substrate, and interrupting the application between the multiple layers to form a plurality of voids at the interfaces.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.