Layered transparent conductive oxide thin films
US9688570B2 · kind B2 · utility
1Cited by
1References
17Claims
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Key dates
| Filing date | Mar 4, 2014 |
| Grant date | Jun 27, 2017 |
| Priority date | — |
| Expiry date | Mar 4, 2034 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC03C2218/345
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
Transparent conductive oxide thin films having a plurality of layers with voids located at each interface. Smooth TCO surfaces with no post growth processing and a largely tunable haze value. Methods of making include applying multiple layers of a conductive oxide onto a surface of a substrate, and interrupting the application between the multiple layers to form a plurality of voids at the interfaces.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.