Microvalve device and fluid flow control method
US9689508B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Aug 9, 2012 |
| Grant date | Jun 27, 2017 |
| Priority date | — |
| Expiry date | Sep 13, 2032 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16K2099/009
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A microvalve device and fluid flow control method, the microvalve device comprising: a microvalve body, the microvalve body being composed of multiple layers and comprising a first layer (1) and a second layer (2) bonded with the first layer (1), the second layer (2) having a plurality of fluid ports (7, 8, 9); a cavity (6) disposed between the first layer and the second layer; a plurality of actuators (3, 4, 5) respectively disposed corresponding to each fluid port, the plurality of actuators (3, 4, 5) controlling the opening and closing of the plurality of fluid ports (7, 8, 9). The fluid flow control method comprising: respectively employing a plurality of actuators to independently control the opening and closing of a plurality of fluid ports.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.