MEMS device with common mode rejection structure
US9689677B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 19, 2015 |
| Grant date | Jun 27, 2017 |
| Priority date | — |
| Expiry date | Aug 25, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5769
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A MEMS device includes a drive spring system coupling a pair of drive masses and a sense spring system coupling a pair of sense masses. The drive spring system includes a constrained stiff beam and flexures interconnecting the pair of drive masses. In response to drive movement of the drive masses the flexures enable pivotal movement of the constrained stiff beam about its center hinge point to enable anti-phase drive motion of the drive masses and to suppress in-phase motion of the drive masses. The sense spring system includes diagonally oriented stiff beams and a spring system that enable anti-phase sense motion of the sense masses while suppressing in-phase motion of the sense masses. Coupling masses interposed between the drive and sense masses decouple the drive motion of the drive masses from the sense motion of the sense masses.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.