Patent · US Active

Pressure sensor with cover layer

US9689766B2 · kind B2 · utility

2Cited by

5References

8Claims

0Family size

Assignee

ENDRESS+HAUSER GMBH+CO.KG · DE

Inventors

Benjamin Lemke · Berlin, DE
Rene Ziermann · Kleinmachnow, DE
Sebastian Pobering · Kleinmachnow, DE
Ralf Roder · Erfurt, DE

Key dates

Filing date	Sep 24, 2013
Grant date	Jun 27, 2017
Priority date	—
Expiry date	Jan 29, 2034

Classification

Technology area (CPC G)Physics
CPC primaryG01L9/085
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A pressure sensor, comprising: a substrate having a measuring membrane, and an electrically conductive cover layer, which has electrical contact elements and is electrically isolated from the substrate by an insulating layer. The cover layer is divided in such a manner that two independent measurements of the respective resistance between two contact elements are possible in two regions electrically isolated from one another. The regions of the cover layer serve to shield external electromagnetic influences from the sensor elements of the measuring membrane, to detect damage to the measuring membrane, as well as for determining exact temperature.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.