Characterization of dielectric materials
US9689822B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 22, 2015 |
| Grant date | Jun 27, 2017 |
| Priority date | — |
| Expiry date | Apr 12, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/24
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system and a method for characterizing a dielectric material are provided. The system and method generally include applying an excitation signal to electrodes on opposing sides of the dielectric material to evaluate a property of the dielectric material. The method can further include measuring the capacitive impedance across the dielectric material, and determining a variation in the capacitive impedance with respect to either or both of a time domain and a frequency domain. The measured property can include pore size and surface imperfections. The method can still further include modifying a processing parameter as the dielectric material is formed in response to the detected variations in the capacitive impedance, which can correspond to a non-uniformity in the dielectric material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.