Patent · US Active

Systems and methods to stabilize high-Q MEMS sensors

US9689889B1 · kind B1 · utility

3Cited by

5References

5Claims

0Family size

Inventors

Roberto Casiraghi · Milano, IT
Igino Padovani · Novate Milanese, IT
Giorgio Massimiliano Membretti · Milano, IT
Filippo David · Milano, IT

Key dates

Filing date	Oct 30, 2013
Grant date	Jun 27, 2017
Priority date	—
Expiry date	Nov 22, 2034

Classification

Technology area (CPC G)Physics
CPC primaryG01P2015/0814
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Various embodiments of the invention allow to reduce unwanted high-Q oscillations in capacitive MEMS sensors. In certain embodiments, stabilization of high-Q MEMS sensors is accomplished through a dedicated ultra-low power circuit that provides a bias voltage to one or more sensor electrodes during an OFF-phase. The bias voltage forces a balance condition that eliminates perturbations and enables smooth transitions that, ultimately, result in shorter sensor settling times.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.