Pressure based mass flow controller
US9690301B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 9, 2013 |
| Grant date | Jun 27, 2017 |
| Priority date | — |
| Expiry date | Feb 25, 2035 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/776
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A mass flow controller (MFC) has a standard envelope with an enclosure and a corresponding base. A pressure transducer is communicatively coupled to a process gas in a proportional inlet valve without being physically coupled to the base. The space formerly occupied by the pressure transducer is available for additional component integration, or reduction of the standard envelope size. A second pressure transducer is located remotely and shared by multiple MFCs. A relief valve can quickly relieve a P1 pressure of a P1 volume of process gas. A first laminar flow element (LFE) and a second LFE and in series high conductance valve configured in parallel to produce a wide-range MFC that maintains accuracy.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.