Holding apparatus for holding substrates
US9691647B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Apr 22, 2016 |
| Grant date | Jun 27, 2017 |
| Priority date | — |
| Expiry date | Apr 22, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67309
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present disclosure relates to a holding apparatus for holding substrates, comprising: a case, and a first support rod and a second support rod, the first support rod is provided with first support sub-rods, and the second support rod is provided with second support sub-rods, the holding apparatus further comprising: a first adjusting mechanism configured to control the first support sub-rods at a first position to move in a direction perpendicular to the first support rod, so as to adjust gaps between the first support sub-rods and the second support sub-rods at a second position corresponding to the first position, and/or a second adjusting mechanism configured to control the second support sub-rods at the second position to move in a direction perpendicular to the second support rod, so as to adjust gaps between the second support sub-rods and the first support sub-rods at the first position.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.