Patent · US Active

Device and method for producing hermetically-sealed cavities

US9692009B2 · kind B2 · utility

8Cited by

2References

14Claims

0Family size

Assignee

Osram OLED GMBH · DE

Inventors

Erwin Lang · Regensburg, DE
Thilo Reusch · Donaustauf, DE
Philipp Schwamb · Regensburg, DE

Key dates

Filing date	Jul 18, 2013
Grant date	Jun 27, 2017
Priority date	—
Expiry date	Jul 18, 2033

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T428/13
WIPO fieldAudio-visual technology
WIPO sectorElectrical engineering

Abstract

An apparatus may include a first support covered with at least one ALD precursor and/or at least one MLD precursor, and a second support covered with at least one ALD precursor and/or at least one MLD precursor which is/are complementary to the ALD precursor and/or MLD precursor of the first support. The first support is at least partly joined to the second support by an atomic bond between the ALD precursor of the first support and the ALD precursor of the second support or between the MLD precursor of the first support and the MLD precursor of the second support in such a way that an ALD layer or an MLD layer is formed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.