Method for analyzing nested optical cavities
US9696135B2 · kind B2 · utility
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Key dates
| Filing date | Dec 8, 2014 |
| Grant date | Jul 4, 2017 |
| Priority date | — |
| Expiry date | Dec 17, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/25
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical sensor apparatus illuminates nested optical cavities by a broadband light source, such as a tunable laser. A composite interference signal is obtained from light reflected from the nested optical cavities, partial interference spectra are recovered from the composite interference signal, cavity depths are measured based on the partial interference spectra, and electrical signals are provided based on the final measured cavity depths.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.