Spectral data processing apparatus, spectral data processing method, and recording medium
US9696203B2 · kind B2 · utility
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Key dates
| Filing date | Jun 18, 2014 |
| Grant date | Jul 4, 2017 |
| Priority date | — |
| Expiry date | Sep 24, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J2003/283
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A spectral data processing apparatus includes an analyzer configured to perform principal component analysis of spectral data acquired for each of a plurality of regions of a sample, wherein the analyzer obtains an eigenvector by performing the principal component analysis of first spectral data of a first region out of the plurality of regions, and performs the principal component analysis of second spectral data of a second region different from the first region out of the plurality of regions using the obtained eigenvector.
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