Interdigitated optical modulator
US9696567B2 · kind B2 · utility
0Cited by
5References
18Claims
0Family size
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Key dates
| Filing date | Jan 26, 2015 |
| Grant date | Jul 4, 2017 |
| Priority date | — |
| Expiry date | Jul 11, 2035 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/834
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical modulator comprises a silicon substrate, a buried oxide (BOX) layer disposed on top of the silicon substrate, and a ridge waveguide disposed on top of the BOX layer and comprising a first n-type silicon (n-Si) slab, a first gate oxide layer coupled to the first n-Si slab, a first p-type silicon (p-Si) slab coupled to the first gate oxide layer, and a light propagation path that travels sequentially through the first n-Si slab, the first gate oxide layer, and the first p-Si slab.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.