RF impedance matching network
US9697991B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 1, 2015 |
| Grant date | Jul 4, 2017 |
| Priority date | — |
| Expiry date | Jul 1, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32183
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An RF matching network includes a control circuit configured to instruct at least one EVC to alter its variable capacitance, the alteration of the variable capacitance causing the matching network to achieve a preliminary match state, the preliminary match state having an associated first reflection parameter value at an RF source output; and upon the achievement of the preliminary match state, instruct an RF source to alter a variable RF source frequency, the alteration of the variable RF source frequency causing achievement of a final match state, the final match state having an associated second reflection parameter value at the RF source output; wherein the second reflection parameter value is less than the first reflection parameter value.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.