Substrate storing container
US9698033B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Oct 12, 2012 |
| Grant date | Jul 4, 2017 |
| Priority date | — |
| Expiry date | Oct 12, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67383
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate storing container is provided with a lid-body-side substrate support section that can support the edges of a plurality of substrates when a container main body opening is occluded by the lid body. The lid-body-side substrate support section is provided with: a lid-body-side substrate receiving section and a pair of lid-body-side leg sections respectively connected to one end and the other end of the lid-body-side substrate receiving section. One lid-body-side leg section of the pair of lid-body-side leg sections is fixed at the outside of a concavity for fixing a lid-body leg section, and the other lid-body-side leg section of the pair of lid-body-side leg sections is fixed within the concavity for fixing a lid-body leg section.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.