Surface acoustic wave (SAW) based strain sensor
US9702772B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 26, 2015 |
| Grant date | Jul 11, 2017 |
| Priority date | — |
| Expiry date | Jun 8, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/106
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor system for determining deformation of an object subject to forces. The sensor system comprises an object upon which forces are exerted and a cavity within the object, a first substrate for supporting surface acoustic waves in an upper surface of the first substrate, the first substrate disposed in the cavity, a first surface acoustic wave transducer disposed on the upper surface and responsive to an interrogation signal for generating an incident surface acoustic wave in the upper surface, a first reflector array responsive to the incident surface acoustic wave for creating reflected surface acoustic waves on the upper surface, the reflected surface acoustic waves received by the transducer and having characteristics indicative of strain deformation of the object due to a force exerted on the object.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.